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Collect. Czech. Chem. Commun. 1990, 55, 2432-2440
https://doi.org/10.1135/cccc19902432

Qualitative analysis of the vapour-phase equilibrium composition in the systems Si-Cl and Si-Cl-H by matrix-isolation IR spectroscopy

Jindřich Leitnera, Jan Mikuleca and Čestmír Černýb

a Department of Materials for Electronics, Prague Institute of Chemical Technology, 166 28 Prague 6
b Department of Physical Chemistry, Prague Institute of Chemical Technology, 166 28 Prague 6

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  • Vázquez J., Stanton John F.: Theoretical Investigation of the Structure and Vibrational Spectrum of the Electronic Ground State X̃(1A‘) of HSiCl. J. Phys. Chem. A 2002, 106, 4429. <https://doi.org/10.1021/jp013761c>
  • Habuka Hitoshi, Aoyama Yasuaki, Akiyama Shoji, Otsuka Toru, Qu Wei-Feng, Shimada Manabu, Okuyama Kikuo: Chemical process of silicon epitaxial growth in a SiHCl3–H2 system. Journal of Crystal Growth 1999, 207, 77. <https://doi.org/10.1016/S0022-0248(99)00360-7>
  • Habuka Hitoshi, Nagoya Takatoshi, Mayusumi Masanori, Katayama Masatake, Shimada Manabu, Okuyama Kikuo: Model on transport phenomena and epitaxial growth of silicon thin film in SiHCl3H2 system under atmospheric pressure. Journal of Crystal Growth 1996, 169, 61. <https://doi.org/10.1016/0022-0248(96)00376-4>
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