Collect. Czech. Chem. Commun. 1991, 56, 2020-2029
https://doi.org/10.1135/cccc19912020

Diffusion model for deposition of epitaxial GaAs layers prepared by the MOCVD method

Jindřich Leitnera, Petr Voňkab, Josef Stejskalc, Přemysl Klímac and Rudolf Hladinac

a Department of Materials for Electronics, Prague Institute of Chemical Technology, 166 28 Prague 6
b Department of Physical Chemistry, Prague Institute of Chemical Technology, 166 28 Prague 6
c Research Institute of Radiocommunication A. S. Popov, 142 21 Prague 4

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